電漿水洗式尾氣(廢氣)處理機
保護環境是我們每個人的責任
機台類型：電漿水洗式
工藝流程：廢氣預熱處理→渦流電漿高溫裂解(2,000~10,000C°)→水洗可溶解毒氣→水洗降溫排氣
處理氣體：PFCs Gas (CF4、SF6、NF3...) & N2O....
Plasma & Wet Gas Scrubber for CVD & Matel Etch & PAD Etch
* Variable Plasma Power
- Lower power 5KW ~ 10KW for NF3
- 6KW ~ 20KW for N2O
* High DRE for CVD Gas and N2O
- Low Power, High Surface Discharger : Reinforce Energy Efficiency
- Plasma Swirl Effect: Improve Gas Mixing by Turbulence
- High efficiency for N2O gas
* Easy Maintenance
- Reduce PM Time
* Water Flowing Wall
- Anti-clogging for Powder, Long PM Time
* De-NOx
- Special design for NOx reduction
電漿水洗式尾氣(廢氣)處理機
保護環境是我們每個人的責任
機台類型：電漿水洗式
工藝流程：廢氣預熱處理→渦流電漿高溫裂解(2,000~10,000C°)→水
洗可溶解毒氣→水洗降溫排氣
處理氣體：PFCs & HFCs Gas (CF4、SF6、NF3...)
Plasma & Wet Gas Scrubber
Variable Plasma Power
- 6KW ~ 20KW
High DRE for PFCs & HFCs Gas
- Low Power, High Surface Discharger : Reinforce Energy Efficiency
- Plasma Swirl Effect: Improve Gas Mixing by Turbulence
- Heat Conductive Lining: Waste Gas Preheating & High Energy Efficiency
EasyMaintenance
- Reduce PM Time
- Long PM period to 3 months
